专利名称：Interferential position measuring
arrangement
发明人：Wolfgang Holzapfel,Michael
Hermann,Walter Huber,Völker Hofer,UlrichBenner,Karsten Sändig
申请号：US10635422申请日：20030806公开号：US07154609B2公开日：20061226
专利附图：
摘要：An interferential position measuring arrangement including a light source, which
emits a beam of rays and an optical element, which converts the beam of rays emitted bythe light source into an incoming beam of rays. A scale grating which splits the incomingbeam of rays into a first partial beam of rays and a second partial beam of rays. A firstscanning grating that causes splitting of the first partial beam of rays and a secondscanning grating that causes splitting of the second partial beam of rays, wherein aperiodically modulated interferential fringe pattern with definite spatial interferentialfringe pattern period results in a detection plane. A detection arrangement which causessplitting of light entering through the detection arrangement into at least three
different spatial directions and optoelectronic detector elements arranged in the at leastthree spatial directions for detecting phase-shifted scanning signal.
申请人：Wolfgang Holzapfel,Michael Hermann,Walter Huber,Völker Hofer,UlrichBenner,Karsten Sändig
地址：Obing DE,Tacherting DE,Traunstein DE,Traunreut DE,Trostberg DE,Palling DE
国籍：DE,DE,DE,DE,DE,DE
代理机构：Brinks Hofer Gilson & Lione
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