专利名称：Integrated circuit isolation system发明人：Yung Fu Chong,Zhijiong Luo申请号：US11369239申请日：20060306
公开号：US20070205469A1公开日：20070906
专利附图：
摘要：A method of manufacturing a self-aligned inverted T-shaped isolation structure.An integrated circuit isolation system including providing a substrate, forming a baseinsulator region in the substrate, and depositing an insulator column having a narrowerwidth than the base insulator region on the base insulator region.
申请人：Yung Fu Chong,Zhijiong Luo
地址：Singapore SG,Carmel NY US
国籍：SG,US
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